Figure 1 shows profile of surface electric potential and figure 2 profile of surface total displacement of zcomponent. A method to enhance stroke level of a mems micromirror. Mathematical modeling was performed by means of finite element method, representing microactuator as a 3d cantilever microstructure and taking into account influence of bending forces generated by electrostatic field. In this work, the design and fabrication of electrostatically actuated polydimethylsiloxane pdms mems cantilever on flexible pdms substrate is presented. Modelling and characterization of cantilever based mems piezoelectricsensors and. Comparison the various design of cantilever mems switch. Characterization of an algangan electrostatically actuated cantilever using finite element method. Optimal design of coupled microelectromechanical resonating arrays for mass sensing. Design considerations of a mems cantilever beam switch for. Cf stands for clamped free if you have any questions, leave a comment, i will do my best to. Simulating the displacement of a beam with comsol 5. In this work, an electrostatically actuated mems micromirror that bene.
Micromirror cantilever liftoff stress level shape shape square straight 50x106 0. Also an electrostatically actuated cantiliver beam was simulated to see the. Published 19 june 2002 journal of micromechanics and microengineering, volume 12, number 4. Piezoelectric shearactuated beam the model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the piezoelectric devices predefined multiphysics interface. The physical parameters of the cantilever were analysed and optimised using taguchi method coupled with. I need further insights into the following topics pertaining to this problem. Sayanu pamidighantam 1, robert puers 2, kris baert 1 and harrie a c tilmans 1. Bernstein, large displacement parallel plate electrostatic actuator with saturation type characteristic, sensors and actuators, 1. Krylov school of mechanical engineering, faculty of engineering, tel aviv university, ramat aviv 69978 tel aviv, israel summary.
Proceedings of the asme 2012 11th biennial conference on engineering systems design and analysis. Pullin voltage analysis of electrostatically actuated beam structures with fixedfixed and fixedfree end conditions. The capacitor is comprised of copper electrical connections, an actuation electrode, a bottom capacitor plate, an anchor post, and a top capacitor plate attached to the end of a suspended bimorph cantilever. A side electrode of length l s and thickness d s is located at the distance g.
The model performs a static analysis on a piezoelectric actuator based on the movement of a cantilever beam, using the piezoelectric devices predefined multiphysics interface. Modeling microresonators with electrostatic actuation. Static and dynamic analysis of electrostatically actuated microcantilevers using the spectral element method. The model is quite simple to calculate the pullin limit. Pmnpt exhibit nonlinear strain as turorial function of electric field. Electrostatically actuated cantilever using finite element method nicholas deroller, muhammad qazi, jie liu, and. This study is about investigation of design considerations of a mems switch that is considered to pull in under electrostatic force generated by a piezoelectric based voltage generator inside the mems. The model solves the deformation of the beam under an applied voltage. We can similarly derive the expression for the mechanical force for linear timeharmonic analysis with a dc bias. Pdf static analysis of electrostatically actuated micro. For radio astronomy applications variable capacitors, realized by electrostatically actuated, micromechanical meanderssuspended bridges mems made of superconducting niobium, have been measured to find cv.
Azizi s 2010 pure parametric excitation of a micro cantilever beam actuated by. Comsol access is a service we provide to our users and prospects. Piezoelectric actuated microgripper this model shows the fundamentals of how to set up a piezoelectric model with mechanical contact. Electrostatically actuated mems relay arrays for high. The convergence problems for au electrostatically actuated cantilever. Modeled electroformed mems variable capacitors for cobalt. Energybased techniques are used to extract static and dynamic pullin parameters of the distributed electromechanical model that accounts for the fringing field capacitance, moderately large deflections.
Stability analysis of an electrostatically actuated out of plane mems structure. We present the systematic development and application of a generic shape optimization methodology to enhance the static and dynamic pullin ranges of electrostatically actuated microbeams. Governing equations of an electrostatically actuated clampedclamped and a cantilever narrow microbeam. The external electrical circuits show that the drive voltage u drive is applied to the builtin drive electrode. Static analysis of electrostatically actuated micro cantilever beam, procedia engineering 51, 20, pp. Pullin voltage analysis of electrostatically actuated. A new analytical model to estimate the voltage value and. The convergence problems for au electrostatically actuated. Static analysis of electrostatically actuated micro cantilever beam. Structural mechanical analysis of mems micromirror using.
Variable capacitors between the ff and pf range are very interesting for high frequency applications like variable filters, resonators, etc. The microgripper contains a stacked piezoactuator, which operates in the longitudinal mode. The results obtained from the simulation of straight shaped cantilever beams and sshaped cantilever beams are tabulated. This paper presents a matrix configuration of electrostatically actuated microcantilever relay arrays that are connected in parallel to shunt high currents to.
Note that while comsol employees may participate in the discussion forum. A simulation of an electrostatically actuated cantilever beam is also reported in this paper which is commonly used in rf switches. Feasibility study of a resonant accelerometer with. Figure 2 shows that zerodisplacement constraint is neglected and, merely, the zeroangle constraint is reckoned in the lumped model. The capacitor is comprised of copper electrical connections, an actuation electrode, a bottom capacitor plate, an anchor post, and a top capacitor plate attached to the end of a. I am new to comsol and presently trying to simulate the pullin instability of electrostatically actuated micro beams in comsol mems module. The results are also compared with existing literature. Some other analytical models,14 assume the deflection functions of electrostatically actuated beams as the polynomialfunctionsthatsatisfy theboundary conditions. Use this model or demo application file and its accompanying instructions as a starting point for your own simulation work. Another significant limiting factor is the high contact resistance resulted from the low driving force, which is provided by microactuators. Static analysis of electrostatically actuated micro. Static analysis using comsol multiphysics finite element package is done to validate the results. Static analysis of electrostatically actuated micro cantilever beam article pdf available in procedia engineering 51.
A closed form solution for the pullin voltage of the. Simultaneous contraction in the transversal direction and elongation in the longitudinal direction closes the gripper and. Journal of nanoscience hindawi publishing corporation. Consequently, computations are simple and the pullin limit can be calculated in a couple of steps as onethird of the original spacing between electrodes g3. Enoc 2017, june 25 30, 2017, budapest, hungary bistability of a cantilever actuated by fringing electrostatic fields n. As shown in figure 3, the predicted torsional stiffness of both models was in good agreement with the experimentally measured stiffness for both magnetically and electrostatically actuated designs. Here the energy source to drive the piezoelectric device is vibrations the whole system undergoes.
Pdf reducing pullin voltage by adjusting gap shape in. Lin 3 1 arizona state university, department of electrical engineering, tempe, az 85287 2 freescale semiconductor, sensor and analog products division, tempe, az 85284 3 university of california at berkeley, department of mechanical engineering, berkeley, ca 94720. The elastic cantilever beam is one of the elementary structures used in mems designs. In this work, a 3d model of an electrostatically actuated micro cantilever has been developed using comsol for characterization using the finite element method fem. The microcantilever has algangan hfet embedded on its base. Younis 1, 1 physical science and engineering division, king abdullah university of science and technology kaust, thuwal 239556900, saudi arabia. Pohit, a large deflection model for the pullin analysis of electrostatically actuated microcantilever beams, journal of sound and vibration 322, 2009, pp. This model shows the bending of a cantilever beam under an applied electrostatic load. In this study, a new approach is brought to calculate the pullin voltage easily and. The capacitor is set up to be actuated both magnetically and electrostatically via a. A 3d model of an electrostatically actuated micro cantilever has been developed for characterization using the finite element method. Conclusions comsol multiphysics has helped in better. Figure 1a shows a cross section of an encased cantilever with an integrated excitation electrode. To this end, the governing partial differential equation of equilibrium is considered and reduced to an algebraic equation using a simple and computationally efficient single.
Stability analysis of an electrostatically actuated out of. The objective of the present paper is to represent a novel method to investigate the stable and unstable behaviors of fully clamped rectangular nanomicroplates under the effects of electrostatic and casimir pressures. Model of the cantilever actuated by fringing electrostatic field 2. We report on an approach to achieve bistability in a simple initially planar cantilever device. Static and dynamic analysis of electrostatically actuated. In this model i make an accurate modeling for electrostatically actuated cantilever on comsol to study its behavior. Excerpt from the roceedings of the comsol conference 2010 oston. Benjeddou, it models a sandwich beam using the shear mode of the. Design and fabrication of pdmsbased electrostatically. The electrostatic force is thus a sum of a dc force and a timeharmonic force at the excitation frequency.
Reducing pullin voltage by adjusting gap shape in electrostatically actuated cantilever and fixedfixed beams article pdf available in micromachines 12 september 2010 with 169 reads. This proposed device employs a threebottom electrode con. Electrostatically actuated cantilever on comsol youtube. The nonlinear electrostatic force was valuated via numerical methods implemented in comsol software where threedimensional simulations were performed for different gaps.
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